The science and engineering of microelectronic fabrication (Record no. 30545)
[ view plain ]
| 000 -LEADER | |
|---|---|
| fixed length control field | 00544nam a2200193Ia 4500 |
| 001 - CONTROL NUMBER | |
| control field | 30420 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 140416s9999 xx 000 0 und d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0-19-513605-5 |
| 040 ## - CATALOGING SOURCE | |
| Transcribing agency | PK-LaUMT |
| 082 ## - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.3852 |
| Item number | CAM-S |
| 100 ## - MAIN ENTRY--PERSONAL NAME | |
| Personal name | Stephen A. Campbell |
| 245 #4 - TITLE STATEMENT | |
| Title | The science and engineering of microelectronic fabrication |
| Statement of responsibility, etc | Stephen A. Campbell |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Place of publication, distribution, etc | New York,USA: |
| Name of publisher, distributor, etc | Oxford University Press, |
| Date of publication, distribution, etc | 2001 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 603 p. |
| 546 ## - LANGUAGE NOTE | |
| Language note | EN |
| 650 ## - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Semiconductors-Design and construction |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Books |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total Checkouts | Full call number | Barcode | Date last seen | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|
| UMT Main Campus | UMT Main Campus | 2014-04-16 | 621.3852 CAM-S | 38002 | 2014-05-03 | 2014-05-03 | Books |