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The science and engineering of microelectronic fabrication

Stephen A. Campbell

The science and engineering of microelectronic fabrication Stephen A. Campbell - 2nd - New York,USA: Oxford University Press, 2001 - 603 p.

EN

ISBN: 0-19-513605-5

Subjects--Topical Terms:
Semiconductors-Design and construction

Dewey Class. No.: 621.3852 / CAM-S

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