000 00461nam a2200181Ia 4500
001 60515
008 141120s9999 xx 000 0 und d
020 _a9788181285058
040 _cPK-LaUMT
082 _a 621.5
_bMIC-
100 _aMahalik, N. P.
245 _aMicromanufacturing and nanotechnology
_cMahalik, N. P.
260 _aNew York,USA:
_bSharpe Professional,
_c2006
300 _a468 p.
546 _aEN
650 _aNanotechnology
942 _cBK
999 _c60982
_d60982