| 000 | 00488nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 54168 | ||
| 008 | 140505s9999 xx 000 0 und d | ||
| 020 | _a9781420055160 | ||
| 040 | _cPK-LaUMT | ||
| 082 |
_a 620.5 _bMAD-F |
||
| 100 | _aMadou, Marc J. | ||
| 245 |
_aFundamentals of microfabrication and nanotechnology _cMadou, Marc J. |
||
| 250 | _a3rd | ||
| 260 |
_aBoca Raton,USA: _bCRC Press, _c2012 |
||
| 501 | _a3 vols | ||
| 546 | _aEN | ||
| 650 | _aNanotechnology | ||
| 942 | _cBK | ||
| 999 |
_c51576 _d51576 |
||