| 000 | 00544nam a2200193Ia 4500 | ||
|---|---|---|---|
| 001 | 30420 | ||
| 008 | 140416s9999 xx 000 0 und d | ||
| 020 | _a0-19-513605-5 | ||
| 040 | _cPK-LaUMT | ||
| 082 |
_a 621.3852 _bCAM-S |
||
| 100 | _aStephen A. Campbell | ||
| 245 | 4 |
_aThe science and engineering of microelectronic fabrication _cStephen A. Campbell |
|
| 250 | _a2nd | ||
| 260 |
_aNew York,USA: _bOxford University Press, _c2001 |
||
| 300 | _a603 p. | ||
| 546 | _aEN | ||
| 650 | _aSemiconductors-Design and construction | ||
| 942 | _cBK | ||
| 999 |
_c30545 _d30545 |
||