| 000 | 00453nam a2200181Ia 4500 | ||
|---|---|---|---|
| 001 | 29384 | ||
| 008 | 140415s9999 xx 000 0 und d | ||
| 020 | _a0-13-199204-x | ||
| 040 | _cPK-LaUMT | ||
| 082 |
_a 621.3 _bLIU-F |
||
| 100 | _aChang Liu | ||
| 245 | _aFoundation of mems | ||
| 260 |
_aNew Jersey,USA: _bPearson Education International, _c2006 |
||
| 300 | _a530 p. | ||
| 546 | _aEN | ||
| 650 | _aMicroelectro mechanical systems | ||
| 942 | _cBK | ||
| 999 |
_c29456 _d29456 |
||