00413nam a2200157Ia 450000100060000000800410000602000180004704000130006508200170007810000190009524500580011426000460017230000110021854600070022965000190023660515141120s9999    xx            000 0 und d  a9788181285058  cPK-LaUMT  a 621.5bMIC-  aMahalik, N. P.  aMicromanufacturing and nanotechnologycMahalik, N. P.  aNew York,USA:bSharpe Professional,c2006  a468 p.  aEN  aNanotechnology