TY  - BOOK
AU  - Madou, Marc J.
TI  - Fundamentals of microfabrication and nanotechnology
SN  - 9781420055160
U1  -  620.5 
PY  - 2012///
CY  - Boca Raton,USA
PB  - CRC Press
KW  - Nanotechnology
N1  - 3 vols
ER  -